STAMPER, STAMPER PRODUCTION APPARATUS AND PRODUCTION METHOD OF THE SAME, AND FINE STRUCTURE TRANSFER METHOD

摘要

PROBLEM TO BE SOLVED: To provide a stamper in which intrusion of an air bubble is reduced, and a fine structure can be transferred to a transfer object body by a comparably compact apparatus; a stamper production apparatus that can produce the stamper or a production method of the same; and a fine structure transfer method to a transfer object body in which the stamper is used and through-put is high.SOLUTION: A stamper includes: a stamper base material; and a fine structure pattern that is formed on a surface of the stamper base material by a pattern formation resin and is along a curved surface of a convex. A production method of a stamper comprises: deforming a master disk to a curved surface shape of a convex in an opposite side with a single side in which a fine structure pattern is formed; pressing the master disk that has the curved surface shape of a convex to a stamper base material in which a pattern formation resin is applied to transfer the fine structure pattern to the pattern formation resin that is applied; returning the master disk to an original state in a state of the transferred state; after returning, performing exposure of the transfer fine structure pattern to produce a stamper having a transfer fine structure pattern that is along a curved surface shape of a convex in a stamper base material.