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发明名称
探针方法及探针用程式
摘要
申请公布号
TWI435400
申请公布日期
2014.04.21
申请号
TW098126570
申请日期
2009.08.06
申请人
东京威力科创股份有限公司 日本
发明人
田中秀明;深泽幸彦
分类号
H01L21/66;G06F17/50;G01R31/303
主分类号
H01L21/66
代理机构
代理人
林志刚 台北市中山区南京东路2段125号7楼
主权项
地址
日本
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