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发明名称
半导体装置及半导体装置之制造方法
摘要
申请公布号
TWI435435
申请公布日期
2014.04.21
申请号
TW097149884
申请日期
2008.12.19
申请人
旭化成电子材料元件股份有限公司 日本
发明人
马可 可利奇克;汤米斯拉夫 苏黎高吉;望月秀则;森田宗一
分类号
H01L27/02;H01L21/8249
主分类号
H01L27/02
代理机构
代理人
陈长文 台北市松山区敦化北路201号7楼
主权项
地址
日本
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