| 摘要 |
FIELD: chemistry.SUBSTANCE: invention relates to getter materials and particularly to sintered non-evaporating getters, and can be used in vacuum engineering and microelectronics, particularly in discharge devices. The sintered non-evaporating getter comprises three layers, wherein the first and third layers are made of titanium-vanadium alloy powder in ratio of 70:30 wt %, the second layer is made of a mixture of said alloy powder and intercalated carbon in ratio of (80:20)-(99:1) wt %, thickness of the first and third layers is 20-200 times the average particle size of the alloy powder, thickness of the second layer is 1-6 times the thickness of the first or third layer, the active area of the layers is equivalent to at least 50 times the geometrical area of the getter, wherein the porosity of the sintered getter is 30-60%.EFFECT: broader functional capabilities, improved sorption properties and mechanical strength.6 ex, 1 tbl, 1 dwg |
