| 摘要 |
PROBLEM TO BE SOLVED: To provide a finger chuck being capable of keeping circularity with respect to the rotation of a workpiece without lowering the rotational speed or improving the rigidity of a clamp mechanism and allowing processing with high precision.SOLUTION: A finger chuck is provided with a clamp frame 10 arranged in the back surface side of each claw 3 through o rings 16 and 16, the clamp frame 10 is brought into contact with the end surface of a workpiece W to clamp the workpiece. Therefore, even when a clamp mechanism undergoes a distortion, only the O rings 16 and 16 can be distorted, and the influence of the distortion is never transmitted to the workpiece W. The circularity with respect the rotation of the workpiece W, resultantly the precision of processing, can be kept at low costs without lowering the processing efficiency owing to decreasing the rotational speed or modifying the clamp mechanism with a high-rigidity material and/or a high-rigidity structure. |
