TRANSPARENT CONDUCTIVE FILM FORMING MATERIAL OF ZINC OXIDE GROUP, AND TARGET USING THE MATERIAL

摘要

PROBLEM TO BE SOLVED: To provide a zinc oxide group transparent conductive film forming material capable of being used in a target for forming a transparent electric conductive film having practically usable conductivity, an excellent weather-resistance, a high near-infrared transmission and a chemical durability.SOLUTION: A zinc oxide group transparent conductive film forming material is made of an oxide sintered material made of zinc oxide as a main component and containing titanium and carbon. The titanium source is titanium carbide, and the ratio of the atomic number of titanium is 0.2% to 5% to the total metallic atom number.