| 摘要 |
PROBLEM TO BE SOLVED: To provide an air cleaner, which is installed at a ceiling part of a clean room, a semiconductor wafer and the like, which reduces variations in wind speed distribution of clean air and solves the problem in which there are variations in wind speed distribution caused by a part where the wind speed of the clean air supplied from the air cleaner is high and a part where the wind speed is low, and such variations may cause turbulence to occur in a manufacturing device, air to be blown upward, and the production of a semiconductor wafer to be affected.SOLUTION: The air cleaner includes: a fan for sucking air; a motor for rotationally driving the fan; a motor base for fixing the motor; a case for supporting the motor base; and a filter for cleaning the air from the fan, and supplies the cleaned air through the filter. In the air cleaner, an opening plate is provided on a filter surface where the air from the fan enters, the opening plate having an opening which is provided at a point where wind speed is slow in the wind distribution of the clean air, and has a larger aperture area than surrounding openings. |
