| 摘要 |
PROBLEM TO BE SOLVED: To provide a finely structured photoelectric conversion element capable of obtaining excellent photoelectric conversion efficiency by light entering from a flat plate-like laminated structure part side.SOLUTION: This finely structured photoelectric conversion element 1 includes the flat plate-like laminated structure part 2, a mask pattern 3 laminated on the surface of the flat plate-like laminated structure part 2 while having a plurality of opening parts 5 in the surface, a nano-pillar structure part 4 stretched from the surface of the flat plate-like laminated structure part 2 exposed to the opening part 5 and formed by laminating compound semiconductors, and a filler layer 6 filled in a gap between the nano-pillar structure parts 4, and photoelectric conversion is performed by light entering from the flat plate-like laminated structure part 2. The mask pattern 3 is made of a material having a refraction factor within a range of -1.2 to +1.2 compared with the refraction factor of the compound semiconductor in the adjoining flat plate-like laminated structure part 2. |
