| 摘要 |
PROBLEM TO BE SOLVED: To provide a grinding apparatus of a thin plate-like workpiece, that can suppress cost increase of a whole apparatus and of which maintenance is relatively easy.SOLUTION: A grinding apparatus M of a thin plate-like workpiece includes a plurality of grinding units 100 installed along one direction that respectively have: a conveyance unit 10 with a scanning body 13 for scanning along the one direction to convey the workpiece; a machining table 103 for receiving the workpiece from the scanning body 13 to hold the workpiece; and a grinding machine 104 for grinding the workpiece held by the machining table 103. The conveyance unit 10 has a camera for imaging the workpiece attached to the scanning body 13 and held by the machining table 103. The plurality of grinding units 100 respectively has machining table guide means 101 installed in a direction orthogonal to the one direction for moving the machining table 103 from a workpiece delivery position to a workpiece grinding position, and a linear scale 102 for detecting a position of the scanning body 13. |
