| 摘要 |
PROBLEM TO BE SOLVED: To provide an economical protective film coating device capable of suppressing an amount of protective film liquid to be discarded, a laser processing device with the protective film coating device, and a protective film coating method.SOLUTION: A laser processing device comprises: a processing table which holds a workpiece; laser processing means for performing laser processing for the workpiece held on the processing table; a cassette mounting stand on which a cassette which can accommodate a plurality of workpieces is mounted; and transportation means for transporting a workpiece from the cassette mounted on the cassette mounting stand to at least the processing table. This device further comprises: a holding table having a holding surface on which a workpiece is held; a protective film liquid discharge head including a slit-like discharge port for discharging the protective film liquid composed of a water-soluble resin which forms a protective film on a surface of the workpiece held on the holding table; first moving means for approachably/separably and relatively moving the protective film liquid discharge head to the holding surface of the holding table; and second moving means for relatively moving the protective film liquid discharge head in a direction parallel to the holding surface of the holding table. |
