| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanner correction system which assesses assembly accuracy of a scanner to compensate for errors, and a correction method therefor.SOLUTION: A scanner correction system 100 comprises: a light source part 110 forming a laser beam for scanning; a scanner part 120 receiving the laser beam and scanning with a position detection sensor 145 of a moving stage 140 on a lower side; and a control part 130 connected to the scanner part 120 and the position detection sensor 145 and assessing assembly accuracy of the scanner part 120 to compensate for errors in the scanner part 120. |
