| 摘要 |
PURPOSE: An unmanned transportation system is provided to implement stable supply by automatically transporting a mask to a light exposure machine of a clean room. CONSTITUTION: A mask stacker loads masks. A light exposure machine (103) is separated from the mask stacker. The light exposure machine includes an interface (104). An unmanned transportation vehicle (105) transports the mask to the interface by loading the mask. The unmanned transportation unloads the mask on the interface. |
