| 摘要 |
PROBLEM TO BE SOLVED: To improve photoelectric conversion efficiency of a photoelectric conversion device.SOLUTION: A method of manufacturing a photoelectric conversion device 11 includes the following steps of: juxtaposing a first lower electrode layer 2a and a second lower electrode layer 2b on a substrate 1 containing an alkali metal element at a first concentration, with a gap P1; forming a high-resistance layer 6 containing an alkali metal element at a second concentration lower than the first concentration in the gap P1; and forming a semiconductor layer 3 containing metal chalcogenide from on the first lower electrode layer 2a through on the high-resistance layer 6 to on the second lower electrode layer 2b while heating the substrate 1. |
