| 摘要 |
PROBLEM TO BE SOLVED: To provide a contact probe and a contact profilometer which can perform highly-accurate profile measurement by reducing the influence of floating of the probe from a measured object in association with vibration of the probe.SOLUTION: A contact probe used for a profilometer measures a profile of a measured object by scanning a surface of the measured object while contacting with the measured object and also by measuring a position of the contact probe itself. A space is provided inside the contact probe, and heavy bobs are movably arranged in the space. |
