发明名称 |
GLASS ARTICLE CARRYING DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a glass article carrying device in which, upon forming a transparent conductive film on the glass article by performing a thermal CVD method against the glass article under a heating condition, failure of raw material gas spraying is avoided by suppressing position deviation of the glass article due to raw material gas spraying, and a transparent conductive film of uniform thickness on the surface of the glass article is formed.SOLUTION: In a glass article carrying device 100, a glass article 1 on a loading section 10 is carried while Chemical Vapor Deposition (CVD) is performed by spraying a raw material gas to the glass article 1 under a heating condition. The loading section 10 is finished to have a surface roughness rougher than that of the glass article 1. |
申请公布号 |
JP2014065944(A) |
申请公布日期 |
2014.04.17 |
申请号 |
JP20120212081 |
申请日期 |
2012.09.26 |
申请人 |
NIPPON ELECTRIC GLASS CO LTD |
发明人 |
KANAI TOSHIMASA;FUJIMOTO TOMOHITO;MORI NOBUHIRO;TSUCHIYA TAKESHI |
分类号 |
C23C16/44;B65G49/06;C03B35/18;H01L21/677 |
主分类号 |
C23C16/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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