FILM MANUFACTURING METHOD, AND FILM MANUFACTURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a method capable of manufacturing a thickness irregularity suppressed film by a spray coating method.SOLUTION: At a coating step and in a region not having a film deposition member 10, a nozzle 11 is scanned such that at least one of a scanning rate in a second direction of the nozzle 11 before the scanning direction of the nozzle 11 is reversed and a scanning rate in the second direction of the nozzle 11 after the scanning direction of the nozzle 11 has been reversed is lower than the scanning rate in the second direction of the nozzle 11 in the region having the film deposition member 10.