摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a micromirror array, which is capable of efficient mass production of arrays with uniform characteristics.SOLUTION: The method of manufacturing a micromirror array includes the steps of: forming a plurality of projecting lines T each of which has a triangular cross-section and has a vertex angle of 90° between two slopes obliquely projecting from a surface of a long-sized and light-transmissive first resin film (base film 1), in parallel with a lengthwise direction of the film on a processing object surface of the film; laminating a light-transmissive second resin film (spacer film 2) on the first resin film having the projecting lines T formed thereon in close contact with the first resin film; taking up a laminate of the resin films by using a core material C having a prescribed shape to form a roll of a laminate 3 of alternately laminated first and second resin films; and slicing the roll of the laminate 3 at prescribed intervals in a direction parallel with the axis of the core material C. |