发明名称 METHOD OF MANUFACTURING MICROMIRROR ARRAY
摘要 PROBLEM TO BE SOLVED: To provide a method of manufacturing a micromirror array, which is capable of efficient mass production of arrays with uniform characteristics.SOLUTION: The method of manufacturing a micromirror array includes the steps of: forming a plurality of projecting lines T each of which has a triangular cross-section and has a vertex angle of 90° between two slopes obliquely projecting from a surface of a long-sized and light-transmissive first resin film (base film 1), in parallel with a lengthwise direction of the film on a processing object surface of the film; laminating a light-transmissive second resin film (spacer film 2) on the first resin film having the projecting lines T formed thereon in close contact with the first resin film; taking up a laminate of the resin films by using a core material C having a prescribed shape to form a roll of a laminate 3 of alternately laminated first and second resin films; and slicing the roll of the laminate 3 at prescribed intervals in a direction parallel with the axis of the core material C.
申请公布号 JP2014066825(A) 申请公布日期 2014.04.17
申请号 JP20120211266 申请日期 2012.09.25
申请人 NITTO DENKO CORP 发明人 MORITA SHIGENORI;NAGAFUJI AKIKO;JUNI NORIYUKI
分类号 G02B5/08 主分类号 G02B5/08
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