发明名称 ORGANIC EL PANEL MANUFACTURING DEVICE AND ORGANIC EL PANEL MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a laser transfer method or a transfer device which does not cause the occurrence of black spot defect caused by, during a laser transfer process, foreign matter contamination or deterioration in element light-emission characteristics associated with temperature rise, or which enables transfer of an organic layer on a donor substrate to a circuit board at high speed and at high stability.SOLUTION: An organic EL panel manufacturing method of the present embodiment comprises: opposing a circuit board on which a lower electrode is formed with respect to a donor substrate on which an organic EL film is laminated on one principal surface with a constant distance with the donor substrate being kept to convert an oscillation laser beams to a plurality of rectangular laser beams having a rectangular uniform intensity distribution; arranging the plurality of rectangular laser beams in series and at regular intervals to irradiate the plurality of rectangular laser beams on the donor substrate in a predetermined region of the other principal surface at predetermined times in an overlapping manner at prescribed time intervals and more; and peeling off the organic EL film from the donor substrate to transfer the organic EL film on the circuit board opposite the donor substrate.
申请公布号 JP2014067671(A) 申请公布日期 2014.04.17
申请号 JP20120213901 申请日期 2012.09.27
申请人 HITACHI HIGH-TECHNOLOGIES CORP 发明人 YAZAKI AKIO;MATSUZAKI EIJI;ISHIHARA SHINGO
分类号 H05B33/10;H01L51/50 主分类号 H05B33/10
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