DEVICE FOR DETECTING FLUCTUATION IN MOISTURE CONTENT, METHOD FOR DETECTING FLUCTUATION IN MOISTURE CONTENT, VACUUM GAUGE, AND METHOD FOR DETECTING FLUCTUATION IN VACUUM DEGREE

摘要

A moisture content fluctuation detection device including: a silica aerogel placed, disposed to a measurement object space; and a detection unit configured to detect fluctuation in moisture content within the measurement object space, the detection unit including: a light source configured to emit light to the silica aerogel, the light having at least a portion of a range of wavelengths of 1850 nm or greater and 1970 nm or less; a light receiving unit configured to receive the light which has passed through the silica aerogel and has at least a portion of the range of wavelengths of 1850 nm or greater and 1970 nm or less; and a calculation unit configured to calculate the fluctuation in moisture content within the measurement object space from change in light intensity of the light received by the light receiving unit.