发明名称 APPARATUS FOR FLOAT GROWN CRYSTALLINE SHEETS
摘要 <p>An apparatus for forming a crystalline sheet from a melt may include a crucible to contain the melt. The apparatus may also include a cold block configured to deliver a cold region proximate a surface of the melt, the cold region operative to generate a crystalline front of the crystalline sheet and a crystal puller configured to draw the crystalline sheet in a pull direction along the surface of the melt, wherein a perpendicular to the pull direction forms an angle with respect to the crystalline front of less than ninety degrees and greater than zero degrees.</p>
申请公布号 WO2014058489(A1) 申请公布日期 2014.04.17
申请号 WO2013US49542 申请日期 2013.07.08
申请人 VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. 发明人 SINCLAIR, FRANK;KELLERMAN, PETER L.
分类号 C30B15/06;C30B15/14 主分类号 C30B15/06
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