发明名称 |
APPARATUS FOR FLOAT GROWN CRYSTALLINE SHEETS |
摘要 |
<p>An apparatus for forming a crystalline sheet from a melt may include a crucible to contain the melt. The apparatus may also include a cold block configured to deliver a cold region proximate a surface of the melt, the cold region operative to generate a crystalline front of the crystalline sheet and a crystal puller configured to draw the crystalline sheet in a pull direction along the surface of the melt, wherein a perpendicular to the pull direction forms an angle with respect to the crystalline front of less than ninety degrees and greater than zero degrees.</p> |
申请公布号 |
WO2014058489(A1) |
申请公布日期 |
2014.04.17 |
申请号 |
WO2013US49542 |
申请日期 |
2013.07.08 |
申请人 |
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. |
发明人 |
SINCLAIR, FRANK;KELLERMAN, PETER L. |
分类号 |
C30B15/06;C30B15/14 |
主分类号 |
C30B15/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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