METHOD FOR PARTING LAMINATED CERAMIC SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To part a laminated ceramic substrate obtained by laminating a metal film on a ceramic substrate.SOLUTION: Groove processing is performed to a metal film 12 of a laminated ceramic substrate 10 along a line to be scribed, using a patterning tool. A scribe line is formed on a ceramic substrate 11 by means of a scribe device from a surface of the ceramic substrate 11. Break is performed along the scribe line from the surface on the ceramic substrate 11 side. Thus, the laminated ceramic substrate 10 can be perfectly parted.