发明名称 SEMICONDUCTOR LASER AND METHOD OF MANUFACTURING THE SAME
摘要 Provided are a semiconductor laser and a method of manufacturing the same. The method includes: providing a substrate including a buried oxide layer; forming patterns, which includes an opening part to expose the substrate, by etching the buried oxide layer; forming a germanium single crystal layer in the opening part; and forming an optical coupler, which is adjacent to the germanium single crystal layer, on the substrate.
申请公布号 US2014105235(A1) 申请公布日期 2014.04.17
申请号 US201313776428 申请日期 2013.02.25
申请人 ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE 发明人 KIM IN GYOO;KIM GYUNGOCK;KIM SANG HOON;JANG KI SEOK;JOO JIHO
分类号 H01S5/30 主分类号 H01S5/30
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