| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a liquid spray head capable of reducing leakage current and a liquid spray device using the same, as well as a manufacturing method of a piezoelectric device.SOLUTION: A manufacturing method of a liquid spray head is a method of manufacturing the liquid spray head that comprises a piezoelectric body layer 70 held by a first electrode 60 and a second electrode 80 and a piezoelectric device for causing change of pressure in a pressure generation chamber, which performs: a first electrode formation step of forming by evaporation method a first electrode including a step of forming a diffusion constraining layer 62 including at least one type of platinum and iridium; a piezoelectric body layer formation step of forming on the first electrode a piezoelectric body layer made of complex oxide including niobate sodium potassium; and a second electrode formation method of forming a second electrode on the piezoelectric body layer. |
