发明名称 METHOD OF PLASMA PREPARATION OF METALLIC CONTACTS TO ENHANCE MECHANICAL AND ELECTRICAL INTEGRITY OF SUBSEQUENT INTERCONNECT BONDS
摘要 A method of removing oxidation from certain metallic contact surfaces utilizing a combination of relatively simple and inexpensive off-the-shelf equipment and specific chemistry. The method being a very rapid dry process which does not require a vacuum or containment chamber, or toxic gasses/chemicals, and does not damage sensitive electronic circuits or components. Additionally, the process creates a passivation layer on the surface of the metallic contact which inhibits further oxidation while allowing rapid and complete bonding, even many hours after surface treatment, without having to remove the passivation layer. The process utilizes a room-ambient plasma applicator with hydrogen, nitrogen, and inert gasses.
申请公布号 US2014102594(A1) 申请公布日期 2014.04.17
申请号 US201314052867 申请日期 2013.10.14
申请人 ONTOS EQUIPMENT SYSTEMS, INC. 发明人 SCHULTE ERIC FRANK
分类号 B23K1/20 主分类号 B23K1/20
代理机构 代理人
主权项
地址