摘要 |
PROBLEM TO BE SOLVED: To provide a micropump capable of securing a stable flow rate.SOLUTION: A micropump 10 includes a tube 50, a first cam 20, a second cam 30, and fingers 40-46, and has a first state where the first cam 20 and the second cam 30 are rotated in the direction of an arrow R to successively press the fingers 40-46 to successively and repeatedly close and open the tube 50, so that a liquid is allowed to continuously flow, a second state where only the first cam 20 is rotated in the reverse direction at a time when a through hole 27 formed on the first cam 20 is detected by a light detecting element 80 at a position where the second cam 30 releases pressing of the plurality of fingers 40-46 in the first state, and a third state where the rotation of the first cam 20 is stopped at a time when a position of the through hole 27 in releasing the tube 50 by the first cam 20 is detected by the light detecting element 90 in the second state. Thus deterioration of the tube 50 caused by that the tube 50 is pressed for a long time, can be prevented. |