| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat treatment apparatus in which the volume of a chamber is reduced by reducing the projection area of the attachment mechanism and the seal mechanism of a heat-radiation heater in the direction perpendicular to the axis.SOLUTION: A chamber for housing a heat treated work includes a chamber having a wall partitioning the inside of the chamber from the outside, and a heat radiation heater provided to penetrate the partition wall. The heat radiation heater includes a heat radiation part radiating heat for heating a work, and a cylindrical glass tube covering the heat radiation part and having an extension extending over the heat radiation part axially outward. The chamber further includes a ring seal arranged on the outer peripheral surface of the extension, and sealing the inside of the chamber from the outside by bringing the inner peripheral surface into contact with the outer peripheral surface of the extension, and a thermal shield plate placed between the heat radiation part and the ring seal in the axial direction of the glass tube so as to thermally shield the ring seal from the heat radiation part, and having the inner peripheral surface formed along the extension. |
