SHAPE MEASURING DEVICE, AND METHOD OF CORRECTING SHAPE MEASUREMENT ERROR

摘要

PROBLEM TO BE SOLVED: To further effectively reduce a measurement error in a shape measuring device.SOLUTION: A shape measuring device 100 has a slider 16 for supporting a following probe 17 including a tip end ball 17a. A scale portion 19b detects the displacement of a slider 16. A tip end ball displacement detecting portion 19a detects the displacement of the tip end ball 17a. A computing portion 212 has a correction filter 2121 including a first filter 2121a and a second filter 2121b, and an accumulator 2121c; and calculates a measurement value from the displacement of the slider 16 and the tip end ball 17a. The first filter 2121a corrects the displacement of the slider 16 on the basis of frequency transmission characteristics from the scale portion 19 to a tip end of the slider 16. The second filter 2121b outputs a correction value obtained by correcting the value corrected by the first filter 2121a on the basis of frequency transmission characteristics from the tip end of the slider 16 to the tip end ball 17a. The accumulator 2121c outputs a measurement value obtained by adding the correction value to the displacement of the tip end ball.