POLISHING PAD SHEET, POLISHING PAD, METHOD OF MANUFACTURING THE SAME, AND POLISHING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a polishing pad which further highly flattens a surface of a polished object, and is excellent in suppressing generation of a scratch.SOLUTION: A polishing pad includes an elastic resin sheet with a plurality of separate air bubbles formed thereon as a polishing layer. A thickness of the resin sheet after the resin sheet is heated at a predetermined temperature increases by more than 3% with respect to a thickness of the resin sheet before heated.