发明名称 HARD FILM HAVING EXCELLENT ABRASION AND OXIDATION RESISTANCES AND TARGET FOR FORMATION OF THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a hard film having excellent oxidation and abrasion resistances, compared with conventional films.SOLUTION: A hard film having excellent abrasion and oxidation resistances comprises a layer A and a layer B having different compositions and laminated together. The layer A is one selected from the group of a hard film of a normality of (Al,Cr)(CN), a hard film of a normality of (Al,Si,B,Cr)(CN) and a hard film of a normality of (Al,Si,B,Ti)(CN), and the layer B is a hard film of a normality of (M,Si,B)(CN), where M is W and/or Mo. The layers A and B are laminated in such a way as to meet the equation (1): 0.5(nm)≤(the thickness of the layer B)≤(the thickness of the layer A).
申请公布号 JP2014065972(A) 申请公布日期 2014.04.17
申请号 JP20130220392 申请日期 2013.10.23
申请人 KOBE STEEL LTD 发明人 YAMAMOTO KENJI
分类号 C23C14/06;B23B27/14;B23B51/00;B23C5/16;C22C1/04;C22C14/00;C22C21/00;C22C27/04;C22C27/06;C23C14/34 主分类号 C23C14/06
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