发明名称 |
MAGNETIC HEAD INSPECTION DEVICE, AND MAGNETIC HEAD INSPECTION METHOD |
摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic head inspection device and a magnetic head inspection method capable of shortening an inspection time by scanning and efficiently inspecting the magnetic head.SOLUTION: A cantilever of a magnetic force microscope provided with a magnetic probe on a tip is oscillated with a predetermined frequency, detects a specified position of a writing head based on a search two dimensional magnetic field intensity by floating the magnetic probe above the writing head of a magnetic head, sets a shape detection range for detecting a shape of the writing head narrower than the search range based on the specified position, and detects the shape of the writing head by detecting the search two dimensional magnetic field intensity of the writing head showing an oscillating state of the cantilever means during the two dimensional scanning of the shape detection range by floating the magnetic probe above the writing head. |
申请公布号 |
JP2014066544(A) |
申请公布日期 |
2014.04.17 |
申请号 |
JP20120210491 |
申请日期 |
2012.09.25 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORP |
发明人 |
TOKUTOMI TERUAKI;NAKAGOME TSUNEO;HIDA AKIRA;MATSUSHITA NORIMITSU |
分类号 |
G01Q60/50;G01Q80/00;G11B5/455 |
主分类号 |
G01Q60/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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