发明名称 |
DELAMINATION DRYING APPARATUS AND METHOD |
摘要 |
An apparatus for delamination drying a substrate is provided. A chamber for receiving a substrate is provided. A chuck supports and clamps the substrate within the chamber. A temperature controller controls the temperature of the substrate and is able to cool the substrate. A vacuum pump is in fluid connection with the chamber. A tilting mechanism is able to tilt the chuck at least 90 degrees. |
申请公布号 |
US2014101964(A1) |
申请公布日期 |
2014.04.17 |
申请号 |
US201213650044 |
申请日期 |
2012.10.11 |
申请人 |
LAM RESEARCH CORPORATION |
发明人 |
SIRARD STEPHEN M.;HYMES DIANE;SCHOEPP ALAN M.;LIMARY RATCHANA |
分类号 |
F26B13/30;F25B21/02;F26B5/06 |
主分类号 |
F26B13/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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