发明名称 |
Manufacturing semiconductor component, comprises e.g. providing three-dimensional substrate body with first closed substrate surface, applying film-forming starting material on body, and forming layer sequence having semiconductor material |
摘要 |
<p>Manufacturing semiconductor component, comprises (a) providing at least one three-dimensional substrate body (1) having a first closed substrate surface (1a), (b) arranging the three-dimensional substrate body in a chamber, (c) applying at least one film-forming starting material (3) on the three-dimensional substrate body along the first closed substrate surface, and (d) forming a layer sequence (4) comprising at least one semiconductor material, on the first closed substrate surface of the three-dimensional substrate body, using material of the film-forming starting material.</p> |
申请公布号 |
DE102012109112(A1) |
申请公布日期 |
2014.04.17 |
申请号 |
DE201210109112 |
申请日期 |
2012.09.26 |
申请人 |
OSRAM OPTO SEMICONDUCTORS GMBH |
发明人 |
WECHSELBERGER, BERND |
分类号 |
H01L21/205;C23C16/46;H01L33/00 |
主分类号 |
H01L21/205 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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