发明名称 Manufacturing semiconductor component, comprises e.g. providing three-dimensional substrate body with first closed substrate surface, applying film-forming starting material on body, and forming layer sequence having semiconductor material
摘要 <p>Manufacturing semiconductor component, comprises (a) providing at least one three-dimensional substrate body (1) having a first closed substrate surface (1a), (b) arranging the three-dimensional substrate body in a chamber, (c) applying at least one film-forming starting material (3) on the three-dimensional substrate body along the first closed substrate surface, and (d) forming a layer sequence (4) comprising at least one semiconductor material, on the first closed substrate surface of the three-dimensional substrate body, using material of the film-forming starting material.</p>
申请公布号 DE102012109112(A1) 申请公布日期 2014.04.17
申请号 DE201210109112 申请日期 2012.09.26
申请人 OSRAM OPTO SEMICONDUCTORS GMBH 发明人 WECHSELBERGER, BERND
分类号 H01L21/205;C23C16/46;H01L33/00 主分类号 H01L21/205
代理机构 代理人
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