| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning device capable of reducing concerns about a cleaning solution overflowing from a vessel for receiving a cleaning solution.SOLUTION: The cleaning device comprises: supporting means which supports an object to be cleaned; cleaning solution supply means which supplies a cleaning solution to an object to be cleaned supported by the supporting means; a vessel which stores the support means and the cleaning solution supply means, and receives the cleaning solution supplied to the object to be cleaned; a drain pipe which is connected to a drain hole formed in the vessel for receiving a cleaning solution and into which the cleaning solution flows through a filter member; an auxiliary drain pipe whose one end is connected to an auxiliary drain hole formed at a position higher than the drain hole in the vessel for receiving a cleaning solution. The other end of the auxiliary drain pipe is connected to the drain pipe at the downstream side of the filter member in the drain pipe. |
