| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate floating device capable of constantly calculating the accurate floating amount of a substrate to control and a method for measuring the floating amount of a substrate.SOLUTION: A substrate floating device 1 which floats a substrate W comprises a floating unit 2 which has an opposing face 14 opposing the back side of the substrate W to be floated and floats the substrate W over the opposing face 14, an analyzer 21 which calculates the amount of floating of the substrate W from the opposing face 14 and a light reflective type height measuring instrument 12 which emits light toward the substrate W floated on the floating unit 2 below the opposing face 14. The floating unit 2 comprises a through hole 15, through which the light emitted from the height measuring instrument 12 and the light coming into the height measuring instrument 12 after reflected with the substrate W are passed, and a reference plate 13 which is a plate provided on the route of the light emitted from the height measuring instrument 12 to the substrate W through this through hole 15, partially reflecting and partially passing the light. |
