发明名称 |
MICROCRYSTALLINE SILICON THIN FILM SOLAR CELL AND THE MANUFACTURING METHOD THEREOF |
摘要 |
The present invention relates to a microcrystalline silicon thin film solar cell and the manufacturing method thereof, using which not only the crystallinity of a microcrystalline silicon thin film that is to be formed by the manufacturing method can be controlled and adjusted at will and the defects in the microcrystalline silicon thin film can be fixed, but also the device characteristic degradation due to chamber contamination happening in the manufacturing process, such as plasma enhanced chemical vapor deposition (PECVD), can be eliminated effectively. |
申请公布号 |
US2014102530(A1) |
申请公布日期 |
2014.04.17 |
申请号 |
US201313836546 |
申请日期 |
2013.03.15 |
申请人 |
ATOMIC ENERGY COUNCIL, EXECUTIVE YUAN INSTITUTE OF NUCLEAR ENERGY RESEARCH;INSTITUTE OF NUCLEAR ENERGY RESEARCH ATOMIC ENERGY COUNCIL, EXECUTIVE YUAN |
发明人 |
WANG MIN-CHUAN;LIAO TIAN- YOU;HUANG CHIH-PONG;JAN DER-JUN |
分类号 |
H01L31/077;H01L31/18 |
主分类号 |
H01L31/077 |
代理机构 |
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代理人 |
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地址 |
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