摘要 |
PROBLEM TO BE SOLVED: To provide a tool for groove processing by removing the metal film partially from a metal film laminated ceramic substrate.SOLUTION: A tool for groove processing by removing the metal film partially from a metal film laminate ceramic substrate, comprises a tip having (a) a circular truncated cone shape, (b) a prismatic shape or (c) a prismatic shape with the right and left part notched. The tool for groove processing is used e.g. for groove processing of a metal film from the surface of the metal film along a scribe line before breaking, in scribing a metal film laminate ceramic substrate from the surface of the ceramic substrate and fragmenting the metal film laminate ceramic substrate by breaking along a scribe line. |