| 摘要 |
PROBLEM TO BE SOLVED: To obtain a fluid supply device which is capable of stable supply irrespective of changes in the surrounding environment and in which a valve can be opened and closed without using an active element and flow in a forward direction is smooth.SOLUTION: A fluid supply device comprises a fluid supply source 2, a valve 3A, pressure difference generating means 4, and pressurization means 6. The valve 3A includes: a housing 10; a displacement component 20 which divides the housing 10 into a first valve chamber 11 and a second valve chamber 12 and is displaced by the pressure of the fluid acting on its front and rear principal surfaces; a first opening 15 which is provided in the first valve chamber 11; a second opening 16 which is provided in the first valve chamber 11; and a third opening 17 which is provided in the second valve chamber 12. Thus, change in flow rate is suppressed even if the pressure of a discharge side or a suction side in the device fluctuates due to a change of a surrounding environment. |
