发明名称 MONOLITHIC THREE-AXIS MAGNETIC FIELD SENSOR
摘要 A three-axis magnetic sensor or magnetometer is provided. Two magnetic sensor Wheatstone bridges using barber pole AMR structures are fabricated on opposite sides of a bump structure formed on a substrate to provide surfaces that are at a predetermined angle with respect to the flat surface of the substrate. The bridge assembly is oriented along the Y axis and the bridges are interconnected such that Y and Z channel signals can be produced by processing of the bridge signals. The X channel signals are provided by an X axis sensor provided on the level surface of the substrate.
申请公布号 WO2014059110(A1) 申请公布日期 2014.04.17
申请号 WO2013US64286 申请日期 2013.10.10
申请人 MEMSIC, INC. 发明人 CAI, YONGYAO;JIANG, LEYUE;ZAVRACKY, PAUL;ZHAO, YANG;GU, SHUO
分类号 G01R33/00 主分类号 G01R33/00
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