| 摘要 |
[Problem] Since a working chamber for performing an operation of washing an object to be washed is provided so as to move vertically in a washing tank and be separated from the washing tank and airtightly shut off, a minimal space required for an operation of washing the object to be washed such as drying under reduced pressure can be provided, and drying under reduced pressure can be efficiently performed in the presence of washing liquid or washing vapor in the washing tank without unnecessary burden on a reduced pressure system. [Solution] A pressure-resistant working chamber 2 which can move vertically in a washing tank 1, has an opening part 22 capable of opening and closing on the side face in a direction of vertical movement, and loads an object 12 to be washed is provided. A covering part 24 by which the working chamber 2 can be sealed by covering the opening part 22 provided on the side of the working chamber 2 and can be depressurized by being connected to a reduced pressure system 27 is provided in the inner face of the washing tank 1 so as to move horizontally. |
