发明名称 CUTTING DEVICE
摘要 PROBLEM TO BE SOLVED: To recognize whether a flaw occurred on the upper surface of a workpiece or not before the cutting of the workpiece finishes.SOLUTION: A cutting device 1 stores the captured image of the upper surface of a workpiece W before cutting as a first captured image 30 in a first storage 22, stores the captured image of the upper surface of a workpiece W after cutting as a second captured image 31 in a second storage 23 and can recognize whether the upper surface of the workpiece W has a flaw or not by comparing the first captured image 30 and the second captured image 31 with a recognition part 24. Therefore, a cause of flaws can be found before the cutting of the workpiece W finishes and the whole surface of the workpiece W is prevented from being flawed.
申请公布号 JP2014067857(A) 申请公布日期 2014.04.17
申请号 JP20120212144 申请日期 2012.09.26
申请人 DISCO ABRASIVE SYST LTD 发明人 KUGA TAKUYA
分类号 H01L21/301 主分类号 H01L21/301
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