| 摘要 |
The present invention provides a method for attaching a probe card in which a probe card can be attached to and detached from a conveying stage with ease. In a wafer inspecting device (10) a conveying stage (18) is moved so that a stage-side camera (28) and a tester-side camera (16) disposed near a tester (15) are made to face each other to determine a reference position; a pin mark (24) on the tester (15) is confirmed by the stage-side camera (28) to determine a first distance from the reference position to the center of a pogo frame (19) of the tester (15); a target mark (32) of a probe card (2) mounted on the conveying stage (18) is confirmed by the tester-side camera (16) to determine a second distance from the reference position to the center of the probe card (20); and the conveying stage (18) is moved on the basis of the determined reference position, the first distance, and the second distance so that the probe card (20) is made to face the pogo frame (19). |
