| 摘要 |
The present invention relates to a laser beam profile inspecting apparatus capable of accurately inspecting and measuring the laser beam profile of actual process power, and checking and controlling the location where a panel is irradiated with a laser beam and checking whether the location deviates more precisely, thereby uniformly performing laser processing. In order to achieve this, the laser beam profile inspecting apparatus of the present invention comprises: an object lens on which the laser beam is beamed from the laser irradiation part is incident by being installed on the lower side of the panel which is the opposite side of the laser irradiation part based on the panel; a laser beam controlling part which changes the route of the laser beam passing through the object lens and controls the amount of laser beam light by installing on the lower side of the object lens; a laser beam profile checking part which checks the laser beam profile passing through the laser beam controlling part by being installed in the laser beam controlling part; and a light installation part which shoots a light so that the image of the panel and the profile of the laser beam passing through the laser beam controlling part by being installed on the upper side of the laser beam controlling part. |
