<p>An improved MEMS device and method of making. Channels are formed in a first substrate around a plurality of MEMS device areas previously formed on the first substrate. Then, a plurality of seal rings are applied around the plurality of MEMS device areas and over at least a portion of the formed channels. A second substrate is attached to the first substrate, then the seal ring surrounded MEMS device areas are separated from each other. The channels include first and second cross-sectional areas. The first cross-sectional area is sized to keep saw debris particles from entering the MEMS device area.</p>
申请公布号
EP2147894(B1)
申请公布日期
2014.04.16
申请号
EP20090165255
申请日期
2009.07.10
申请人
HONEYWELL INTERNATIONAL INC.
发明人
RIDLEY, JEFF A.;GLENN, MAX;NOHAVA, JAMES C.;HORNING, ROBERT D.;REKSTAD, JAME