| 摘要 |
PROBLEM TO BE SOLVED: To provide a transfer device that can transfer a fine transfer pattern to an accurate position of a molded article even if a mold is formed of a material that does not transmit light and the molded article is not provided with an alignment mark. SOLUTION: The transfer device includes: a mold holder 9 that can hold the mold M and move and position the mold M in a direction to approach or separate from the molded article W; a molded article holder 5 that can hold the molded article W and move and position the molded article W in a direction to intersect the approaching/separating direction of the mold holder 9: a position deviation amount detecting means 11 detecting the position deviation amount of the molded article W with respect to the mold M by detecting the edge position of the molded article W by a sensor 15 movable between a first position where the sensor 15 is inserted between the mold M and the molded article W, and a second position where the sensor 15 is away from the mold M and the molded article W; and a control means 51 controlling to position the sensor 15 in the first position to detect the position deviation amount of the molded article W, to correct the position deviation amount by moving the mold holder 9 and to bring the mold M into contact with the molded article W to carry out transfer. COPYRIGHT: (C)2013,JPO&INPIT |
