| 摘要 |
<p>A highly accurate three-dimensional measurement base is specified with simple settings.
When a peak occurs in the positive Z-axis direction, a hemisphere or semi-spheroid figure (z ‰¥ 0) is placed to contain a position (x i , y i ) where a base point should be obtained, scanning is performed such that the bottom of the figure contains the position (x i , y i ), and the minimum value 1 min of the difference between the Z position of a surface profile image and the height of the hemisphere or semi-spheroid figure at each position, and the height of the hemisphere or semi-spheroid figure at the position (x i , y i ) are obtained. The maximum value of the sums is expressed as L ( xi , yi ), and a base point (X i , Y i , L (xi , yi) is specified. Base points are specified throughout the target surface by the same base point setting method, and a three-dimensional measurement base is specified on the basis of the specified base points.</p> |
