| 摘要 |
<p>The invention relates to a scanning electron microscope, wherein a short focal length is realized, and a reflective electron generated from a sample at a low angle is detected efficiently to form a sample image. The invention is characterized in that a secondary electron exchange conversion which generates a secondary electron by collision of the reflective electron is arranged at a portion closer to the electron source side than an objective lens is and at a portion closer to the sample side than a secondary electron detector is. According to the above-mentioned constitution, the reflective electron generated from the sample at a low angle can be detected efficiently. <IMAGE></p> |
