发明名称 RECONFIGURABLE SPECTROSCOPIC ELLIPSOMETER
摘要 A Mueller ellipsometer of the type having a first rotating element on an incident beam side of a sample and a second rotating element on a reflected beam side of the sample and a detector having an integration time, having a controller for selectively and separately adjusting (1) a first angular frequency of the first rotating element and (2) a second angular frequency of the second rotating element.
申请公布号 KR20140045388(A) 申请公布日期 2014.04.16
申请号 KR20137032895 申请日期 2012.04.09
申请人 KLA-TENCOR CORPORATION 发明人 KRISHNAN SHANKAR;WANG HAIMING
分类号 G01N21/21;G01J4/00 主分类号 G01N21/21
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