| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for coating which shorten tact time even when continuously coating substrates, and an apparatus for coating. SOLUTION: The method for continuously coating a plurality of substrates S, being successively conveyed, with a liquid while successively conveying the substrates S by levitation comprises the nozzle-controlling process of controlling a jetting condition of the liquid at the nozzle jetting the liquid using a definite region at the rear side in the substrates S-conveying direction. COPYRIGHT: (C)2011,JPO&INPIT |
