发明名称 Interposers, electronic modules, and methods for forming the same
摘要 <p>An interposer comprises a substrate and a plurality of posts. Each of the posts extends substantially through a thickness of the substrate. A method for forming an interposer comprises forming a fill hole in a first side of a substrate and a cavity in a second side of the substrate. The cavity is in fluidic communication with the fill hole. A plurality of posts is formed in the cavity. An encapsulant is injected through the fill hole into the cavity to encapsulate the plurality of posts. </p>
申请公布号 EP2624290(A3) 申请公布日期 2014.04.16
申请号 EP20130166078 申请日期 2009.04.03
申请人 THE CHARLES STARK DRAPER LABORATORY, INC. 发明人 RACZ, LIVIA M.;TEPOLT, GARY B.;THOMPSON, JEFFREY C.;LANGDO, THOMAS A.;MUELLER, ANDREW J.
分类号 H01L21/68;B81C1/00;H01L21/48;H01L21/60;H01L23/13;H01L23/498;H01L23/538;H01L25/10 主分类号 H01L21/68
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