| 发明名称 |
STRIPPING AND CLEANING COMPOSITIONS FOR REMOVAL OF THICK FILM RESIST |
| 摘要 |
A stripping and cleaning composition suitable for removal of a film resist comprises: about 2-55 wt% of one or more alkanolamine, or one or more morpholin, or a mixture thereof; about 20-94 wt% of one or more organic solvent; and about 0.5-60 wt% of water, based on the total weight of the composition. |
| 申请公布号 |
KR20140045275(A) |
申请公布日期 |
2014.04.16 |
| 申请号 |
KR20130119920 |
申请日期 |
2013.10.08 |
| 申请人 |
AIR PRODUCTS AND CHEMICALS, INC. |
发明人 |
EGBE MATTHEW I.;WU AIPING;RAO MADHUKAR BHASKARA |
| 分类号 |
G03F7/42 |
主分类号 |
G03F7/42 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
